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Question

Consider the following Excimer Lasers used for photolithography and surgery purposes :

1. Ar2 Excimer laser
2. ArF Excimer laser
3. XeCl Excimer laser
4. XeF Excimer laser

The correct sequence of the descending order of wavelength of operation is

This question was previously asked in
UGC NET 2014 Paper 1 Question Paper (28-Dec-2014)
The correct answer is

4, 3, 2, 1

 Excimer wavelengths are standard figures, and they happen to run in the reverse of the order the question lists them.

ExcimerWavelengthPhoton energyTypical use
XeF351 nm3.5 eVDye-laser pumping, marking
XeCl308 nm4.0 eVDermatology, laser angioplasty
ArF193 nm6.4 eVPhotolithography, LASIK surgery
Ar2126 nm9.8 eVVacuum-UV research

Descending wavelength is therefore XeF, XeCl, ArF, Ar2 — that is 4, 3, 2, 1, option 4. The list as printed is in ascending order, so the answer is simply that list reversed, which is the quickest way to see it.

The pattern behind the numbers. The halogen fixes the wavelength far more than the noble gas: fluorides sit at shorter wavelengths than chlorides for a given noble gas only when the noble gas is lighter, and the rare-gas dimer Ar2, with no halogen at all, is shortest of the four. Practically, remembering the two workhorses — ArF at 193 nm and KrF at 248 nm — anchors the rest.

What an excimer actually is. The name contracts "excited dimer": the molecule exists only in the excited state. Its ground state is unbound, so as soon as the molecule emits a photon it falls apart into free atoms. That gives the perfect population inversion — the lower laser level empties itself instantly and can never fill up — which is why excimer lasers are so efficient in the ultraviolet, where conventional four-level schemes struggle.

Why 193 nm matters so much in electronics. Photolithographic resolution follows

\(R=k_{1}\dfrac{\lambda}{NA}\)

so the industry's move from 365 nm (mercury i-line) to 248 nm (KrF) to 193 nm (ArF) bought each successive generation of finer feature sizes; immersion lithography then extended 193 nm well below its nominal limit.

And why the same wavelength suits surgery : a 6.4 eV photon exceeds the binding energy of carbon-carbon bonds, so tissue is removed by direct photo-ablation rather than by heating — a clean cut with almost no thermal damage to the surrounding material, which is exactly what corneal reshaping requires.

Hence, the descending order of wavelength is 4, 3, 2, 1.

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