In the process of photolithography, an optical stepper is used for the exposure of the wafers. Write the correct order of various processes starting from the light source to the die on wafer in an optical stepper. (1) Illumination diffuser (2) Condenser lens (3) Reficle (4) Interferometer
(1), (2), (3), (4)
In an optical stepper, light from the source (for example a mercury lamp or excimer laser) travels through the illumination optics, then the mask (reticle), then the projection lens onto the wafer, which sits on a stage positioned by a laser interferometer.
Illumination diffuser (1): first element after the source; it homogenises the light so the reticle is illuminated uniformly.
Condenser lens (2): collects the diffused light and directs a uniform beam onto the reticle.
Reticle (3): carries the pattern of one or a few dies; the light passing through it carries the image that is projected (reduced) onto the wafer.
Interferometer (4): at the wafer end, the laser interferometer measures the stage position so each die is aligned and stepped accurately.
Hence, the order from the light source to the die on wafer is (1), (2), (3), (4).
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